ATF 自動對焦系統

自動對焦系統
應用範圍 :
> 半導體光學檢測 – Wafer, Package and Die Sorting
> 面板光學檢測 – TFT-LCD, Solar Cell and Micro-LED
> 生物醫學取像 – Liquid Biopsy, Cell Slide and Fluorescence Microscopy
> 精密雷射製程 – Cutting, Marking and Dicing
  • 產品功能:
  • 移動或靜態物體的高速即時自動對焦
  • 內建高響應伺服馬達控制器，每秒對焦3000次
  • 對應area scan和line scan的高速顯微影像掃描完整解決方案。高度整合系統提供簡易安裝與使用
  • 高階SoC FPGA技術和全數位化演算法提供高可靠度和高精確度
  • 內建高均勻度光源系統，並提供超高亮度光源或暗視野光源的選配，亮度可達1M Lux.
  • 可選配線性多物鏡轉換系統(最多可裝置4個物鏡)並保證符合Class 100無塵等級
  • 與infinity-corrected microscope系統相容
  • Ethernet網路控制介面，抗躁能力提供工業級的可靠性
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系列規格表

 
Control Interface High-speed Ethernet
Laser Wavelength 785 nm / 820 nm
Laser Safety Class 3B
Focusable sample properties Reflective surface, matte surface and transparent material
Specimen Reflectivity 1% ~ 100%
Image Field Max. 30 mm
Camera Mount C-Mount / M42-Mount
Focusing Accuracy One-quarter ~ one-sixth of DOF
Focusing update rate 3 KHz
Focusing Range
 ±600 μm (objective lens 20X)
±2,700 μm (objective lens 10X)
±9,200 μm (objective lens 5X)
±10,000 μm (objective lens 2X)
Z axis - Travel  ±10 mm
Z axis - Resolution 0.015 μm with 16-bit encoder
Z axis - speed 20mm/s @ single lens.
10mm/s @ linear lens changer and four objectives.
Illuminator - Default 5W high uniformity lighting with built-in LED driver.
Illuminator – Options Lighting MLSU - High power bright field illumination.
DFLS - Ultra-high intensity dark field illumination.
Illuminator – Options LED Driver Programmable LED Driver with high-speed external trigger synchronization capability. 
The maximum frequency of strobe input reaches to 100kHz.

取像實例
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