ATF 自动对焦系统

自动对焦系统
应用范围 :
> 半导体光学检测 – Wafer, Package and Die Sorting
> 面板光学检测 – TFT-LCD, Solar Cell and Micro-LED
> 生物医学取像 – Liquid Biopsy, Cell Slide and Fluorescence Microscopy
> 精密雷射製程 – Cutting, Marking and Dicing
  • 产品功能:
  • 移动或静态物体的高速即时自动对焦
  • 内建高响应伺服马达控制器，每秒对焦3000次
  • 对应area scan和line scan的高速显微影像扫描完整解决方案。高度整合系统提供简易安装与使用
  • 高阶SoC FPGA技术和全数位化演算法提供高可靠度和高精确度
  • 内建高均匀度光源系统，并提供超高亮度光源或暗视野光源的选配，亮度可达1M Lux.
  • 可选配线性多物镜转换系统(最多可装置4个物镜)并保证符合Class 100无尘等级
  • 与infinity-corrected microscope系统相容
  • Ethernet网路控制介面，抗躁能力提供工业级的可靠性
加入产品询问车 DM下载

系列规格表

Control Interface High-speed Ethernet
Laser Wavelength 785 nm / 820 nm
Laser Safety Class 3B
Focusable sample properties Reflective surface, matte surface and transparent material
Specimen Reflectivity 1% ~ 100%
Image Field Max. 30 mm
Camera Mount C-Mount / M42-Mount
Focusing Accuracy One-quarter ~ one-sixth of DOF
Focusing update rate 3 KHz
Focusing Range
 ±600 μm (objective lens 20X)
±2,700 μm (objective lens 10X)
±9,200 μm (objective lens 5X)
±10,000 μm (objective lens 2X)
Z axis - Travel  ±10 mm
Z axis - Resolution 0.015 μm with 16-bit encoder
Z axis - speed 20mm/s @ single lens.
10mm/s @ linear lens changer and four objectives.
Illuminator - Default 5W high uniformity lighting with built-in LED driver.
Illuminator – Options Lighting MLSU - High power bright field illumination.
DFLS - Ultra-high intensity dark field illumination.
Illuminator – Options LED Driver Programmable LED Driver with high-speed external trigger synchronization capability. 
The maximum frequency of strobe input reaches to 100kHz.

取像实例
TOP