ATF Autofocus Microscope System

Autofocus Microscope System
Applications:
> Semiconductor Optical Inspection - Wafer, Package and Die Sorting.
> Flat-panel Optical Inspection - TFT-LCD, Solar Cell and Micro-LED.
> Biomedical Science Imaging - Liquid Biopsy, Cell Slide and Fluorescence Microscopy.
> Precision Laser Processing - Cutting, Marking and Dicing.
  • Product Features:
  • High-speed instant autofocus on moving or static objects.
  • Focusing 3K times per second. Built-in high response servo motor controller.
  • A complete solution for Area & Line scan in high-speed microscopic image scanning. Highly integrated system for easy setup and use.
  • Advanced SoC FPGA technology and fully digitized algorithm provide high reliability and high accuracy.
  • Built-in high uniformity light illumination. Optional ultra-high intensity bright & dark field illumination reaches million lux.
  • Optional linear lens changer, DIC and fluorescence optical system.
  • Compatible with an infinity-corrected microscope system.
  • Gigabit Ethernet network control interface provides industrial-grade reliability.
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Product Lineup Table

Features / Model Name ATF-S / ATF-SL ATF-SLX ATF-SI
Control Interface Gigabit Ethernet
Laser Wavelength 785 nm / 820 nm
Laser Safety Class 3B
Focusable sample properties Reflective surface, matte surface and transparent material
Specimen Reflectivity 1% ~ 100%
Image Field Max. 30 mm
Camera Mount C-Mount / M42-Mount
Focusing Accuracy One-quarter ~ one-sixth of objective DOF
Focusing Update Rate 3 KHz 500 Hz 250 Hz
Sampling Rate 15 KHz 2.5 KHz 1.25 KHz
Focusing Range ±700 μm (objective lens 20X)
±3,000 μm (objective lens 10X)
±9,200 μm (objective lens 5X)
±10,000 μm (objective lens 2X)
Z axis – Travel & profile ±10 mm with adaptive S-curve motion profile
Z axis - Resolution 0.015 μm with 16-bit encoder
Z axis - Speed 20mm/s @ single lens.
10mm/s @ linear lens changer and four objectives.		 20mm/s @ single lens. 10mm/s @ single lens.
Z axis – Position update rate 3,000 times per second
Z axis – Max. acceleration Acceleration: 1,000 mm/s2
Deceleration: 400 mm/s2
Illuminator - Default 5W high uniformity lighting with built-in LED driver.
Illuminator – Options Lighting MLSU - High power bright field illumination.
DFLS - Ultra-high intensity dark field illumination.
Illuminator – Options LED Driver Programmable LED Driver with high-speed external trigger synchronization capability.
The maximum frequency of strobe input reaches to 500kHz.

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