ATF Autofocus Microscope System

Autofocus Microscope System
Applications:
> Semiconductor Optical Inspection - Wafer, Package and Die Sorting.
> Flat-panel Optical Inspection - TFT-LCD, Solar Cell and Micro-LED.
> Biomedical Science Imaging - Liquid Biopsy, Cell Slide and Fluorescence Microscopy.
> Precision Laser Processing - Cutting, Marking and Dicing.
  • Product Features:
  • High-speed instant autofocus on moving or static objects.
  • Built-in high response servo motor controller. Focusing 3K times per second.
  • A complete solution for area & line scan in high-speed microscopic image scanning. Highly integrated system for easy setup and use.
  • Advanced SoC FPGA technology and fully digitized algorithm provide high reliability and high accuracy.
  • Built-in high uniformity light illumination. Optional ultra-high intensity bright & dark field illumination reaches million lux.
  • Optional linear lens changer up to four objectives with cleanroom Class 100 guaranteed.
  • Compatible with an infinity-corrected microscope system.
  • Ethernet network control interface. Noise immunity provides industrial-grade reliability.
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Product Lineup Table

Control Interface High-speed Ethernet
Laser Wavelength 785 nm / 820 nm
Laser Safety Class 3B
Focusable sample properties Reflective surface, matte surface and transparent material
Specimen Reflectivity 1% ~ 100%
Image Field Max. 30 mm
Camera Mount C-Mount / M42-Mount
Focusing Accuracy One-quarter ~ one-sixth of DOF
Focusing update rate 3 KHz
Focusing Range
 ±600 μm (objective lens 20X)
±2,700 μm (objective lens 10X)
±9,200 μm (objective lens 5X)
±10,000 μm (objective lens 2X)
Z axis - Travel  ±10 mm
Z axis - Resolution 0.015 μm with 16-bit encoder
Z axis - speed 20mm/s @ single lens.
10mm/s @ linear lens changer and four objectives.
Illuminator - Default 5W high uniformity lighting with built-in LED driver.
Illuminator – Options Lighting MLSU - High power bright field illumination.
DFLS - Ultra-high intensity dark field illumination.
Illuminator – Options LED Driver Programmable LED Driver with high-speed external trigger synchronization capability. 
The maximum frequency of strobe input reaches to 100kHz.

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